Matched context for sub-chamber and subchamber

The page lists matched contexts for sub-chamber and subchamber.

Share - sub-chamber	Share - subchamber	Phrase
7.23%	16.11%	pressure in {sub-chamber or subchamber}
8.93%	3.85%	connect {sub-chamber or subchamber} [perform operation]
4.62%	4.27%	lower [location] {sub-chamber or subchamber}